Magnetic field probe for measuring the magnetic field strength by using the Hall effect

摘要

The invention relates to a magnetic field probe (1) for measuring the magnetic field in its three components Z, Y and X by using the Hall effect. The magnetic field probe is constructed on a semiconductor wafer (2) of a material of a first conducting type, in the surface of which conductors (10, 23) of a material of a second, opposite conduction type are integrated. In order to measure the two components Y and X together, it is proposed according to the invention to provide magnetic field conducting webs (7, 8, 9, 22) on both sides and underneath the beams (10), on both sides which webs guide the components to be measured of the magnetic field and rotate them by 90@. According to the invention, magnetic field probes can be constructed by means of which different direction components of a magnetic field can be measured. IMAGE