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Method and device for measuring the thickness of thin films using the surface acoustic waves
Method and device for measuring the thickness of thin films using the surface acoustic waves
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机译:利用表面声波测量薄膜厚度的方法和装置
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摘要
Method and device for measuring the thickness of a thin film. An acoustic surface wave is created in the film 12 by a means 13, the speed of propagation of this wave is measured, means 14, and the thickness of the film is deduced from this. Application to monitoring integrated circuits. IMAGE
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