PURPOSE:To make it possible to impart an accurate barometer to a surface roughness cross-sectional curve obtained by observing an object to be measured, by parallelly arranging a standard roughness test piece and the object to be measured in the specimen chamber of a scanning type electronic microscope. CONSTITUTION:The specimen 15 and a standard roughness test piece 16 placed on a specimen stand 14 are alternately irradiated with the scanning electron beam of a scanning electronic microscope 12 and reflected electrons are collected by a collector electrode 13 to form an image signal of a surface cross-sectional shape while operation is performed on the basis of magnification set by a manification controller in a calculator 22 through an amplifier 17 and an AD conerter 20. Calibration due to the comparison with the cross-sectional curve obtained with respect to the standard roughness test piece 16 is applied to the surface roughness cross-sectional curve obtained with respect to the specimen 15 to input a barometer and plotted by an output apparatus while the surface rougness cross-sectional curve with the barometer is displayed to a cathode ray tube display apparatus 21.
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