CHARGE EXCHANGE TYPE NEUTRAL PARTICLE ANALYZER

摘要

PURPOSE:To widen the analizable energy range and to improve the resolution of the device by changing the energy of ions generated through charge exchange of neutral particles by potential applied between a stripping cell and an inlet of the analyzer. CONSTITUTION:Neutral particles released from a plasma experiment device 1 passes through a lead tube 2 evacuated to a vacuo, and are introduced into a stripping cell 4 provided in a vacuum container 3 of a neutral particle analyzer, ion-exchanged with a gas which is charged in the stripping cell 4, and are ionized. The gas is fed from a cylinder 5 into the stripping cell 4 through a leak valve 6. The voltage is applied on the stripping cell 4 from an electric source 8, and the exchange-charged ions are accelerated or moderated during a travel from the stripping cell to an inlet of the analyzer 9. The energy or mass of ions is analyzed with the analyzer 9 and measured with a detector 10.