PROCESS FOR GROWING HIGH-TEMPERATURE SUPERCONDUCTING THIN FILM AND APPARATUS THEREFOR

摘要

PURPOSE:To accurately control the composition of a high-temperature superconducting thin film on a substrate by opening and closing shielidng apparatuses attached to plural evaporation sources synchronous to the action of shielding apparatuses of film- thickness sensors provided corresponding to the evaporation sources. CONSTITUTION:A substrate 2 heated with a heater 3 is placed at the upper part in a vacuum chamber 1 provided with an evacuation port 1a. The lower part of the chamber 1 is provided with plural evaporation sources 4-6 having shutter plates 7-9. Film-thickness sensors 10-12 having shutter plates 13-15 are placed at the right-hand side of the substrate 2. Controllers 16-18 are placed between the sources 4-6 and the shutter plates 7-9. The shutter plates 7 and 13 are opened to deposit the evaporation material evaporated from the source 4 to the substrate 2 and the detection face of the sensor 10. Thereafter, the shutter plates 8 and 14 are opened and the shutter plates 7, 9, 13 and 15 are closed to deposit the evaporation material evaporated from the source 5 to the substrate 2 and the detection face of the sensor 11. Subsequently, the shutter plates 9 and 15 are opened and the shutter plates 7, 8, 13 and 14 are closed to deposit the evaporation material evaporated from the source 6 to the substrate 2 and the detection face of the sensor 12.