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DEVICE FOR ULTRATHIN LAYER STRUCTURES PRODUCTION BY MEANS OF EPITAXIAL GROWTH FROM LIQUID PHASE
DEVICE FOR ULTRATHIN LAYER STRUCTURES PRODUCTION BY MEANS OF EPITAXIAL GROWTH FROM LIQUID PHASE
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机译:液相表观生长手段生产超薄层结构的装置
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摘要
A device allowing a simple and economic way of ensuring the production of ultra-thin layer structures by means of epitaxial growth from the liquid phase with identical composition of the required layers. The essence of the device is that the prepared initial smelts are placed into chambers for layer depositing, made in the form of a set of channels with the required width of its individual branches. The mutual position of the individual channels allows growth of ultra-thin layers in the required sequence.IMAGE
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