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deposition of a vanadium base for magnetic films.

机译:沉积磁性薄膜的钒基。

摘要

A sputtered vanadium underlayer is provided under Co-Ni films used for magnetic recording; for "high Hc" and "good squareness", a V thickness of about 1000 A DEG or more is preferred with 500 A DEG - 5000 A DEG Co-20 Ni; the sputtering being preferably at "moderate" rate, with RF diode or DC magnetron equipment, onto a "moderately-cool", high-flatness substrate, using argon or the like at moderate pressure.
机译:在用于磁记录的Co-Ni膜下提供了一个溅射的钒底层;对于“高Hc”和“良好的矩形度”,V厚度优选为约1000ADE或更高,其中500A-5000ACo-20Ni为佳。优选使用氩气等在中等压力下,利用RF二极管或DC磁控管设备,以“中等”速率将溅射溅射到“中等冷却”,高平坦度的基板上。

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