Coordinate probe employing a contactless measuring principle of absolute interferometry

摘要

The invention relates to a device for the interferometric determination of the position of a scanning point on a reflecting or diffusely reflecting surface. In combination with coordinate measuring machines, it enables a unique 3-D coordinate measurement in a manner similar to mechanically touching probes, but with the high permissible processing and scanning rates of optical scanning systems. The device is based on multifrequency two-beam interferometry. In this case, use is made of a defined phase angle and/or phase relationship between the interference signals of the various frequencies in order to determine position. The device is applied in dimensional metrology, in particular as a scanning system for coordinate measuring machines.