Turbomolecular pumpthat extracts - vacuum pump

摘要

A turbomolecular vacuum pump comprises a hollow stator (1) in which is mounted a rotor (3) with bladed wheels (7, 8, 9, 10) between which are mounted bladed disks (11, 12, 13). The flat blades (29, 30, 31, 32) of each of the bladed wheels (7, 8, 9, 10) are situated along the circumference on the surface of its hub and are inclined in relation to the planes perpendicular to the rotation axis of the rotor (3) in the direction of rotation. Each blade (29, 30, 31, 32) is so inclined that the line of intersection of its plane with the plane perpendicular to the rotation axis of the rotor (3) is oriented at an angle to the radii of the circumferences of the hub in the points of intersection of those lines with the circumferences of the hub and are oriented, for the bladed wheel (7) located on the side of gas delivery, in the direction of rotation of the rotor (3) and, for the bladed wheel (10) located on the side of gas suction, in the opposite direction.