High purity titanium used as cathodic sputtering target - in molten salt electrolytic cell, with parts contacting electrolyte made of nickel to avoid titanium contamination

摘要

High purity Ti is produced by feeding the Ti raw material into a molten salt electrolysing appts in which the parts which contact salt melt are made of high purity.N. USE/ADVANTAGE - Making high purity Ti used as target material in cathodic sputter coating. Ni does not lead to impuritiess in the Ti ppte contg max 0.1 ppm alkali metal, max 1 ppb radioactive elements and max 100 ppm oxygen.