DRIVING FORCE TRANSFER DEVICE OF ELECTROSTATIC MICROMOTOR

摘要

PURPOSE:To make this device small-sized, lightweight and mass-productive and to achieve high reliability by means of a semiconductor manufacturing system by being equipped with a gear-shaped rotor, plural electrodes arranged in a condition under which a specified part of this rotor is lacked and transfer gears constituted so as to be engaged with the rotor. CONSTITUTION:This device is equipped with a supporting shaft 11, a rotor 12 approximately gear-shaped in an outside diameter of 120mum, plural electrodes 13a to 13i and 13j to 13r facing the teeth of the rotor 12 outside this rotor 12 and arranged in such a condition as a specified part on the circumference is lacked, and transfer gears 14 constituted in the lacked parts of electrodes so as to be engaged with the rotor 12. The rotating rotor 12 itself is a gear and as the transfer gears 14 are situated at the lacked parts of electrodes, the rotor 12 can be directly engaged with the transfer gears 14. Consequently, the rotational driving force of rotor can be taken out easily through transfer gears, which can thereby be driving sources of a micromachine.