Micromotor for stepped movement of microcomponent uses electrostatic forces for contactless transfer of linear movement to oscillating microcomponent supported between 2 reference surfaces

摘要

The micromotor uses electrostatic forces for contactless transfer of the stepped movement to a microcomponent supported between upper and lower reference components, each provided with a surface facing the microcomponent which cooperates with the opposing surface of the latter for providing a linear movement of half a step.