DETECTION OF AXIS MISALIGNMENT OF SYNCHROTRON RADIATION LIGHT AND EXPOSING DEVICE

摘要

PURPOSE:To allow the safe and efficient execution of the axis alignment operation of an aligner by detecting an axis misalignment by using visible light the optical axis of which is the same as the optical axis of synchrotron radiation (SR) light. CONSTITUTION:A taking out window 4 takes out the visible light included in the SR light 2, absorbs rays, such as X-rays harmful to the human body, and maintains the vacuum of a beam line 1. The optical axis is so adjusted that the visible light passing a pinhole 5 is reflected by a parallel mirror 9, is again passed through the pinhole 5, is changed 90 in a part of the optical path by a sampling mirror 10 and is detected by a photodetector 11. The reflected light is shielded by the pinhole 5 and the quantity of the light arriving at the detector 11 decreases if the mirror 9 has an inclination with the optical axis. The axis misalignment is exactly corrected if the posture of the aligner 6 is so corrected as to admit the visible light 3 reflected by the mirror 9 into the pinhole 5 and the microadjustment is so executed as to maximize the output of the detector 11.