Method of producing thin-film electroluminescent device using CVD process to form phosphor layer

摘要

In producing a thin-film electroluminescent device having a ZnS:Mn film deposited by a MOCVD process using a mixed gas containing an organic zinc compound, an organic sulfur compound and an organic manganese compound, either methyl mercaptan or ethyl mercaptan is used as the sulfur compound and di&pgr;-cyclopentadienylmanganese as the manganese compound. The zinc compound is preferably dimethylzinc or diethylzinc. As the merits of using such a combination of organic metal compounds the MOCVD operation can be accomplished at a relatively low substrate temperature, and the deposited ZnS:Mn film is high in the light emitting efficiency and low in the threshold voltage.