Mold with hydrogenated amorphous carbon film for molding an optical element

摘要

This specification discloses a mold for use for press-molding an optical element, characterized in that at least the molding surface of a mold base material is coated with an a-C:H film containing 5-40 atom % of hydrogen therein and having a film density of 1.5 g/cm.sup.3 or more. Other mold coating films also disclosed are a hydrogenated amorphous carbon film with an intermediate carbide layer between the film and the molding surface, and a hard carbon film containing 0-5 atom % of hydrogen therein and having a spin density of 1×10.sup.18 spin/cm.sup.3 or less and a film densisy of 1.5 g/cm.sup.3 or more.