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Inverted channel substrate planar semiconductor laser

机译:倒沟道基板平面半导体激光器

摘要

A semiconductor laser structure having the same advantages as a channeled substrate planar laser, but without the difficulties of fabrication associated with this structure. The structure in­cludes a substrate (10), a planar first cladding layer (14), a planar active layer (16), and a second cladding layer (18) in which a mesa region (22) is formed. A blocking layer (24) is formed over the second cladding layer (18) and electrical contact (26) is made through the blocking layer (24) in the region of the mesa (22). The blocking layer (24) functions to confine current flow in the mesa region (22) and to pro­vide index-guiding of light in the mesa region (22). Because of its simple geometry, the structure can be conveniently formed using a desirable fabrication process, such as metalorganic chemical vapor depo­sition (MOCVD). In one disclosed embodiment of the invention, the mesa (22') is broadened to include at least one intermediate ledge (28) on each side of a central pedestal. This reduces the abruptness of the change in effective index of refraction encountered by the laser light, and reduces astigmatism in the resultant beam.
机译:半导体激光器结构具有与沟道衬底平面激光器相同的优点,但是没有与该结构相关的制造困难。该结构包括基板(10),平面的第一覆层(14),平面的有源层(16)和第二覆层(18),其中形成台面区域(22)。在第二覆层(18)上形成阻挡层(24),并且在台面(22)的区域中穿过阻挡层(24)形成电接触(26)。阻挡层(24)的作用是将电流限制在台面区域(22)中,并在台面区域(22)中提供光的折射率引导。由于其简单的几何形状,可以使用所需的制造工艺(例如金属有机化学气相沉积(MOCVD))方便地形成结构。在本发明的一个公开的实施例中,台面(22')被加宽以在中央基座的每一侧上包括至少一个中间壁架(28)。这减小了激光遇到的有效折射率变化的突变,并减小了合成光束中的像散。

著录项

  • 公开/公告号EP0284684B1

    专利类型

  • 公开/公告日1992-07-29

    原文格式PDF

  • 申请/专利权人 TRW INC.;

    申请/专利号EP19870308536

  • 发明设计人 HONG CHI-SHAIN;YANG JANE JAN-JAN;

    申请日1987-09-28

  • 分类号H01S3/19;

  • 国家 EP

  • 入库时间 2022-08-22 05:30:22

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