Closed-loop capacitive accelerometer with spring constraint

摘要

A micromachined three-plate capacitive accelerometer incorporates hinges (162,164) attached to top and bottom surfaces of the proof mass (110) that are symmetric about X and Y axes (210,220) and also about diagonal axes (240,250); passageways (42) for gas film damping in the fixed members (30) that do not affect the capacitance to any significant degree; and provision for independently selecting two of the parameters sensitivity, capacitance and maximum acceleration.