Producing microstructure in material - by placing material on magnetically held holder opposite an electrode in vacuum, admitting reactive gas and exposing material to plasma

摘要

Products with microstructures are produced by placing the sample of material in a holder in a vacuum chamber and exhausting the chamber down to a specific pressure level, admitting a reactive gas to the chamber and applying a magnetic field to the sample holder or to an electrode located opposite the sample. This arrangement allows the holder or the electrode to move and to maintain a set gap between the holder and electrode; a plasma is then produced in the reactive gas by the holder and electrode, so forming the microstructure in the sample. A preferred material for the microstructure is a novolak resin or polyimide. ADVANTAGE - The method produces no dust. The gap between electrodes can be changed without contact, so as to suit a wide variety of materials and to use different methods.