Ultraprecise temperature control system and its control manner of machine tool

摘要

PURPOSE:To ultra-precisely control temperature of a system of large load variation or an object to be controlled containing a dead time element. CONSTITUTION:A personal computer 5 commands a high accurate PID temperature regulator 10 to renew and correct the control target value T0,NEW of feed oil temperature T0 by temperature difference DELTAT=TC-T2, where TC is a setting value of return oil temperature T2 of heating medium liquid and T2 is actually controlled return oil temperature. The high accurate PID temperature regulator 10 receives this command, and controls the heating value of a heater 17 for controlling heating through a constant power thyristor phase controller 16. The heating medium liquid is heated by means of the heater 17 for controlling heating and fed to a working machine 1 through a closed type delay tank 21. Heat of the heating medium liquid is exchanged to the working machine 1 and the liquid is returned to a preceding stage cooling means.