CHARGE ALLOTTING METHOD FOR CHARGE PARTICLE IN PARTICLE MODEL DEVICE SIMULATION

摘要

PURPOSE:To ensure the adaptation to an optional grating structure. CONSTITUTION:When a Poisson equation is solved for acquisition of an electric field in a semiconductor device, the particles are produced around a charge particle 11 in a proper distribution (as shown in small squares). Then the charge of the particle 11 is allotted to each grating point (shown in black work) in accordance with the number of particles included in a cell to which the grating points used the numerical calculations belong.