TEMPERATURE CONTROL SYSTEM FOR LOW-TEMPERATURE OF ELECTRODE IN VACUUM DEVICE USING REFRIGERATOR IN APPARATUS FOR PRODUCING SEMICONDUCTOR

摘要

PURPOSE: To obtain a temperature control system for low temperatures of a high-frequency, a microwave, a DC or an AC electrode of a vacuum device using a refrigerator in an apparatus for producing a semiconductor by using a simple apparatus. ;CONSTITUTION: A refrigerant of a refrigerator 7 is directly circulated to an electrode (cathode) 2 so as to cool a high-frequency, a DC or the AC electrode 2 of a vacuum device using the refrigerator T in an apparatus for producing semiconductors. A supply valve 5 for controlling the flow rate and a bypass valve 6 for performing operation reverse to that of the supply valve are installed and the valves are controlled under the PID control of a thermometer 10. Thereby, the accurate temperature control with excellent thermal efficiency can be carried out.;COPYRIGHT: (C)1993,JPO&Japio