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DIRECT LASER IMAGING FOR THREEDIMENSIONAL CIRCUITS AND THE LIKE

机译:三维成像的直接激光成像

摘要

In a method for fabricating a printed circuit board on a doubly contoured or hemispherical substrate such as a radome, a coherent light source is used to form a plurality of elements of a predetermined pattern on the surface of the substrate. The coherent light source preferably includes an excimer laser. The substrate includes a bottom layer and a metallized layer which is covered by a photoresist coating. The first element of the pattern is formed by directly imaging the element in the photoresist coating. The substrate is then displaced relative to the coherent light source until all the elements of the predetermined pattern are formed in the photoresist coating over the entire surface of the substrate. After the pattern is complete and the photoresist is developed, an etching technique is used to remove portions of the metallized layer from the substrate.
机译:在用于在诸如天线罩的双轮廓或半球形基板上制造印刷电路板的方法中,相干光源用于在基板表面上形成预定图案的多个元件。相干光源优选地包括准分子激光器。基底包括底层和被光刻胶涂层覆盖的金属化层。通过直接对光刻胶涂层中的元素进行成像来形成图案的第一元素。然后,使基板相对于相干光源移动,直到在基板的整个表面上的光致抗蚀剂涂层中形成预定图案的所有元素为止。在完成图案并显影光致抗蚀剂之后,使用蚀刻技术从衬底上去除金属化层的部分。

著录项

  • 公开/公告号IL105923D0

    专利类型

  • 公开/公告日1993-10-20

    原文格式PDF

  • 申请/专利权人 MARTIN MARIETTA CORPORATION;

    申请/专利号IL19930105923

  • 发明设计人

    申请日1993-06-07

  • 分类号H05K;

  • 国家 IL

  • 入库时间 2022-08-22 05:11:25

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