Improved miniature microwave and millimeter wave tunable circuit

摘要

A miniature, electrostatically actuated, dynamically tunable circuit (10) is disclosed which is operable to tune a transmission line (16) in response to control signals. The circuit is micromachined with the use of integrated circuit processes such that a fixed transmission line (16) is fabricated on a substrate (12), and a movable signal line (50) is fabricated over the substrate (12) and is movable relative to the fixed transmission line (16) in response to electrostatic fields produced when the control signals are selectively applied to an array of air bridge stator control electrodes (26a-26f) which span the transmission line 16.