Device for filtering charged particles, energy filter, analyser using such an energy filter, electron-bombardment ion source and analyser using said electron-bombardment ion source

摘要

On an energy filter, ions on the inlet side are deflected by means of a first electrostatic field between electrodes (3a', 3b'), passed through a space (15) which is free of field and enter through a screen (11) a further electrostatic deflection field between electrodes (7a', 3b'). The axes (AE, AA) of the beam inlet and outlet are aligned and are offset with respect to the rotation axis (A'Z) of the cylinder forming the outermost electrode (7a'). IMAGE