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Device for filtering charged particles, energy filter and analyser using such an energy filter
Device for filtering charged particles, energy filter and analyser using such an energy filter
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机译:用于过滤带电粒子的装置,能量过滤器和使用该能量过滤器的分析仪
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摘要
On an energy filter, ions on the inlet side are deflected by means of a first electrostatic field between electrodes (3a', 3b'), passed through a space (15) which is free of field and enter through a screen (11) a further electrostatic deflection field between electrodes (7a', 3b'). The axes (AE, AA) of the beam inlet and outlet are aligned and are offset with respect to the rotation axis (A'Z) of the cylinder forming the outermost electrode (7a'). IMAGE
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