Sample holder for substrates to be high temp. coated - comprises hollow body with heat shield and slot for insertion of substrate

摘要

Sample holder for substrates, which are to be coated at high temps., consists of a hollow body made with thinner inner walls (2) and thicker outer walls (3) and with heat shield (4) bolted (5) on. A slot is machined for insertion of the substrate. The substrate is coated through an opening (8). Heating elements heat the substrate through the holder walls. ADVANTAGE - Improved temp. constancy of substrate.