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CONTAINER AND METHOD FOR STORING AND SHIPPING SEMICONDUCTOR WAFERS.
CONTAINER AND METHOD FOR STORING AND SHIPPING SEMICONDUCTOR WAFERS.
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机译:用于存储和运输半导体晶片的容器和方法。
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摘要
The invention relates to a container and method for storing semiconductor wafers. BR/ The container (10) is formed of a portion constituting a box bottom and a lid (12) which, when open, provides access to a slicer (23) placed at inside the container. The bottom of the lower part has an orifice provided with a valve making it possible to establish a certain depression inside the container so that a thin part or membrane (27) of the lid can be applied against the upper edges of the slices (W). BR/ Area of application: manufacture of integrated circuits, etc. / P
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