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CONTAINER AND METHOD FOR STORING AND SHIPPING SEMICONDUCTOR WAFERS.

机译:用于存储和运输半导体晶片的容器和方法。

摘要

The invention relates to a container and method for storing semiconductor wafers. BR/ The container (10) is formed of a portion constituting a box bottom and a lid (12) which, when open, provides access to a slicer (23) placed at inside the container. The bottom of the lower part has an orifice provided with a valve making it possible to establish a certain depression inside the container so that a thin part or membrane (27) of the lid can be applied against the upper edges of the slices (W). BR/ Area of application: manufacture of integrated circuits, etc. / P
机译:本发明涉及用于存储半导体晶片的容器和方法。
容器(10)由构成箱底的部分和盖(12)形成,当打开时,该盖(12)提供通向放置在容器内部的切片器(23)的通道。下部的底部有一个带阀门的孔,可以在容器内部形成一定的凹陷,从而可以将薄的盖子部分或薄膜(27)压在切片(W)的上边缘上。
应用领域:集成电路等的制造

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