首页>
外国专利>
Method and apparatus for measuring minute displacement by subject light diffracted and reflected from a grating to heterodyne interference
Method and apparatus for measuring minute displacement by subject light diffracted and reflected from a grating to heterodyne interference
展开▼
机译:通过光栅衍射反射的目标光对外差干涉测量微小位移的方法和装置
展开▼
页面导航
摘要
著录项
相似文献
摘要
The present invention resides in method and apparatus for measuring a minute displacement, comprising applying a light of a first wavelength at a predetermined angle to a diffraction grating formed on an object whose position is to be detected, subjecting each of the resulting diffracted light and regular reflected light and a light of a second wavelength different from the first wavelength to heterodyne interference with each other to generate a measurement signal and a reference signal, and measuring a phase difference between the measurement signal and the reference signal to thereby determine a minute displacement of the object.
展开▼