Method of manufacturing a substrate for a liquid jet recording head, substrate manufactured by the method, liquid jet recording head formed by use of the substrate, and liquid jet recording apparatus having the head

摘要

A method of manufacturing a substrate is disclosed for an ink jet recording head having an electro-thermal transducer disposed on a substrate supporting member and generating heat energy available to discharge ink, and a protective layer laminated so as to cover the electro-thermal transducer in order to protect the electro-thermal transducer from the ink. The method is characterized by the step of filling any pore created in the protective layer with a protective material. Also disclosed is a substrate for an ink jet recording head manufactured by such method, an ink jet recording head formed by the use of such substrate, and an ink jet recording apparatus having the head.