Recording apparatus comprising liquid jet recording head substrate, a manufacturing method of said substrate, liquid jet recording head using said substrate, said recording head and method of manufacturing the recording head

摘要

PURPOSE: To provide excellent heat releasing properties, high durability and the ability to make the size long by using an angular plate, having an SiO₂ heat accumulation layer obtained by thermal oxidation of silicone which indicates lower than a specific value of displacement density as measured by an etch pit method on the surface of a substrate after thermal oxidation. ;CONSTITUTION: The component parts used are a substrate 1, a thermal resistor 2a provided on the substrate 1, and a pair of electrodes 3a, 3b connected electrically to the thermal resistor 2a at a specified interval. The substrate 1 is made of silicone into angular shape with an SiO₂ heat accumulation layer obtained by thermal oxidation, and has a substrate surface whose displacement density as measured by the etch pit method is maximum 110pits/cm² after thermal oxidation. Thus the generation of a bent substrate when a liquid injection recording head is cut during its manufacturing process is prevented and cost is minimized by increasing a substrate utilization efficiency. In addition, the substrate obtained for a liquid injection recording head has high heat releasing properties superb durability and can be made long in size.;COPYRIGHT: (C)1993,JPO&Japio