PURPOSE: To provide a process for producing high purity nitrogen from air in essentially complete utilization of fuel. ;CONSTITUTION: The high purity nitrogen adequate for such an application for which the essentially complete removal of oxygen is not demanded is formed by the essentially complete utilization of the deoxo fuel by the following steps: (a) Feed air is supplied to a membrane or pressure swing adsorption unit system where sepn. is executed.; (b) the partially purified nitrogen stream contg. the residual oxygen and the discharge stream enriched with the oxygen are extracted from the membrane or pressure swing adsorption unit system; (c) the residual oxygen existing in the partially purified nitrogen stream is brought into reaction with the deoxo fuel in a contact combustion unit system and in such a case, the amt. of the deoxo fuel to be used is specified to the extent of maintaining an excessive oxygen state in the contact combustion unit system and (d) the gaseous high purity nitrogen flow having nitrogen purity of about 99.6 to about 99.99% is recovered from the contact combustion unit system.;COPYRIGHT: (C)1994,JPO
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