ARTICLE STRUCTURE INSPECTING DEVICE BY ELECTRONIC SCANNING TYPE X-RAY SOURCE

摘要

PURPOSE:To provide an article structure inspecting device formed by using an electronic scanning type X-ray source by which inspection processing effi ciency can be improved by increasing X-ray exposure time only to an inspecting object area. CONSTITUTION:Position data on an inspection necessary area on a target surface of an electronic scanning type X-ray source 2 corresponding to an inspecting object area of a material 16 to be inspected is stored beforehand in a memory 7, and when the target surface is scanned by an electron beam, if sweeping speed of the inspection necessry area is made slower than sweeping speed of the other area or only the inspection necessary area is swept, exposure time of an X-ray detected by an X-ray detector 3 after passing through the inspecting object area of the material to be inspected is increased, so that a clear X-ray image can be obtained in the inspecting object area.