ARTICLE STRUCTURE INSPECTING DEVICE BY ELECTRONIC SCANNING TYPE X-RAY SOURCE

摘要

PURPOSE:To improve inspecting efficiency by dividing object range with every scanning range when inspecting object range exceeds electronic scanning range, and driving a moving device after operation is carried out on the shortest moving distance of a material to be inspected in order to inspect it. CONSTITUTION:A CPU 6 judges whether movement of a circuit board is necessary or not according to criterion stored in a comparing identifying memory 4. When inspection is possible in electronic scanning, the movement of the circuit board is not necessary, so that the inspection is carried out by X-ray radiation from an X-ray source 11. On the other hand, when the whole inspecting object range is larger than electronic scanning range, the necessity for carrying out the inspection by moving successively the circuit board arises. Then, the CPU 6 determines a moving direction and a moving distance according to an operation technique stored in a board moving distance operation memory 5. In this case, the moving direction is selected so that the moving distance becomes shortest. Since the circuit board is moved successively according to a moving procedure by means of a board moving device 7, the inspection can be carried out efficiently with every moving step.