MULTILAYER X-RAY MIRROR AND MULTILAYER X-RAY OPTICAL SYSTEM

摘要

PURPOSE: To reflect only desired wavelengths using a multilayer X-ray mirror while suppressing reflection of other wavelengths. ;CONSTITUTION: A multilayer X-ray mirror comprises a thin film of W formed on a base 1 as a high-density layer 2 and a thin film of B₄C formed as a low- density layer 3 with a periodic length of 2.5nm and a periodicity of 100, the thickness ratio of the W to the whole films being 0.5:1. Waves 4, 5 reflected at the surface of the high-density layer and a wave 6 reflected at the back of the high-density layer are obtained. When an X-ray is incident on the mirror at an angle of incidence of 10°, fundamental waves are reflected while reflection of secondary higher harmonic waves is suppressed. When the thickness ratio of the W to the whole films is 0.33:1, reflection of third higher harmonic waves is suppressed. Two multilayer X-ray mirrors of different thickness ratios of the W to the whole films are disposed parallel to each other to form a multilayer X-ray optical system.;COPYRIGHT: (C)1994,JPO&Japio