ARC DISCHARGE DIAGNOSTIC DEVICE OF ARC ION PLATING DEVICE

摘要

PURPOSE: To provide the arc discharge diagnostic device of an arc ion plating device which can surely discover the generation of striker fusion and short circuit in an early time by automatically discriminating the striker fusion and short circuit. ;CONSTITUTION: This arc discharge diagnostic device 26 is used for the arc ion plating device for generating an arc discharge by applying a voltage between an anode 3 and a cathode material 4 in a vacuum 2 and attaching and detaching a striker 6 to and from the cathode material 4 to cause ignition and has an arc voltage detecting means 27, an arc current detecting means 28, and a comparing means 24 for comparing an arc voltage and arc current with the prescribed voltage upper limit value and lower limit value and the current lower limit value. This comparing means 24 outputs a striker fusion signal when the arc voltage is within a range from the prescribed voltage lower limit value up to the prescribed voltage upper limit value and the arc current is within the prescribed current lower limit value. The means outputs a short circuit signal when the arc voltage is below the prescribed voltage lower limit value and the arc current is above the prescribed current lower limit value.;COPYRIGHT: (C)1994,JPO&Japio