MULTILAYER FILM MIRROR FOR X-RAY, REFLECTIVE X-RAY MASK AND FABRICATION THEREOF

摘要

PURPOSE: To increase freedom in relative positional relationship between a reflective mask and an optical focusing system. ;CONSTITUTION: A substance for which difference of refractive index of light having wavelength in X-ray region and refractive index in the vacuum is low and a substance having high difference of refractive index are laminated alternately on a substrate 2 to form a multilayer film mirror for X-ray. In such a multilayer film mirror, surface 3 of the multilayer film 1 is formed while inclining by a predetermined angle ϕ against the interfaces of respective layers constituting the multilayer film 1.;COPYRIGHT: (C)1994,JPO&Japio