APPARATUS AND METHOD FOR TOTAL-REFLECTION X-RAY FLUORESCENCE ANALYSIS

摘要

PURPOSE: To obtain a total-reflection X-ray fluorescence analyzing method and apparatus which can perform the highly accurate analysis without using an X-ray source of high luminance by increasing the value of the solid angle from the X-ray source. ;CONSTITUTION: A sample stage 1 comprises an insulating material such as alumina (Al₂O₃). The surface of the stage is finished as the state of a mirror surface. The surface shape of the sample stage 1 forms a part of, e.g. a cylindrical surface. A spectroscopic crystal 54 is curved so as to protrude along the curving direction. Since a sample 50 is adsorbed with the sample stage 1, whose surface is curved in this way, the surface 51 of the sample is also curved. Therefore, the difference of an incident angle α of incident diffracted X rays B2 becomes small to each other.;COPYRIGHT: (C)1994,JPO&Japio