ULTRA RESOLUTION SCANNING OPTICAL DEVICE, AND LIGHT SOURCE DEVICE FOR ULTRA RESOLUTION OF OPTICAL DEVICE AND FILTER FOR ULTRA RESOLUTION OF OPTICAL DEVICE

摘要

PURPOSE: To obtain ultra resolution which exceeds the limit of diffraction by a simple optical system without causing a great decrease in the quantity of light of main lobe. ;CONSTITUTION: On a light source surface 300, a 1st light source 301 (phase Φ= 0), 2nd light sources (phase Φ = π) 302A and 302B which are positioned outside and nearby the 1st light source, and 3rd light sources 303A and 303B (phase Φ = 0) which is positioned outside and nearby the 2nd light sources 302A and 3O2B are provided. On an image formation plane 310, a light source image of the 1st light source 301 is shown by Xr, light source images of the 2nd light sources 302A and 302B are shown by X2A and X2B, and light source images of the 3rd light sources 303A and 303B are shown by X₃A and X₃B. A refefracted image when only the 1st light source 301 is used is as shown by 301a (birefringent amplitude distribution) and 301i (intensity distribution), but a rerefracted image (intensity distribution) obtained by superposing the light source images of the 1st, 2nd, and 3rd light sources is as shown by 320 and indicates ultra resolution.;COPYRIGHT: (C)1994,JPO&Japio