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Ultra-high resolution scanning optical measuring device

机译:超高分辨率扫描光学测量装置

摘要

Provided is a scanning optical measurement apparatus having super resolution. The scanning optical measurement apparatus includes: a light source; a first lens, which focuses light irradiated from the light source; a first pin hole, which is disposed next to the first lens; a second lens, which diverges light that passed through the first pin hole; a scanning unit, which scans light that passed through the second lens; a first beam splitter, which is disposed between the second lens and the scanning unit; an object lens, which focuses light that passed through the scanning unit on the subject; a slide, where the subject is placed; an optical probe, which reflects the light that passed through the subject after being irradiated from the light source; a second beam splitter, which is disposed between the scanning unit and the object lens; a first optical detector, which detects the light that passed through the first beam splitter after being reflected from the subject and the optical probe; a second pin hole, which is disposed between the first beam splitter and the first optical detector; and a second optical detector, which detects light that passed through the second beam splitter after being reflected from the subject and the optical probe.
机译:提供具有超分辨率的扫描光学测量设备。扫描光学测量设备包括:光源;第一透镜,其聚焦从光源发射的光;第一销孔,邻近第一透镜设置。第二透镜,使通过第一针孔的光发散。扫描单元,其扫描通过第二透镜的光;第一分束器,其布置在第二透镜和扫描单元之间;物镜,将通过扫描单元的光聚焦在被摄体上;放置主题的幻灯片;光学探针,其反射从光源照射后穿过被摄体的光;第二分束器,其布置在扫描单元和物镜之间;第一光学检测器,其检测从被摄体和光学探头反射后通过第一光束分离器的光;第二针孔,其设置在第一分束器与第一光学检测器之间;第二光学检测器,其检测从被摄体和光学探头反射后通过第二分束器的光。

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