Method for treating a replaceable portion of a vacuum etch chamber and a vacuum etch chamber

摘要

Replaceable parts for the vacuum chamber, including the aluminum lid, the quartz door and the seal, are used to clean and roughen their surfaces in order to increase the adherence of the materials deposited in the parts during the processing of the substrate in the vacuum chamber . As a result, the stopping time of the equipment is improved. Replaceable parts can be chemically cleaned in the first step, rinsed to remove chemicals, and dried. The portions are liable to be subjected to edge jetting in order to roughen the surfaces of the portions and improve the sticking force of the material deposited on the surface. In the subsequent step, the portions are ultrasonically cleaned to remove all liberated particles. In the final step, the parts are rinsed and dried to remove moisture before packaging or use. The new monolithically machined aluminum lid has a wall extending from the first surface that fits into the door of the vacuum chamber and a superposition of the first surface sealingly engaging the door when the lid is closed.