Preparation of Transmission Electron Microscopy Specimen Using Ion Beam Focusing

摘要

The present invention relates to a method of preparing a transmission electron microscope (SEM) specimen using an ion beam focusing method for preparing a specimen of a transmission electron microscope (TEM), in which a position to be observed is accurately detected using a secondary electron image, A second step of cutting the specimen so that the specimen can be mounted on a specimen holder of the TEM with a diamond cutter after the first step, And a fourth step of ion etching the jaws on both sides of the specimen so that electrons can be transmitted through the TEM while leaving only the analysis site to be observed after the third step, in a third step of depositing a protective film deposition film on the upper layer with a thickness of 1500 to 2500 The present invention relates to a method of manufacturing a transmission electron microscope specimen using ion beam focusing.