Positive working, radiation-sensitive mixture based on acid-splittable and photochemically acid-forming compounds and processes for the production of relief patterns and relief images.

摘要

The invention relates to a positive radiation-sensitive composition and a process for obtaining relief images. …??The radiation-sensitive composition contains… a) a water-insoluble polymeric binder which is soluble or at least dispersible in aqueous alkaline solutions, and… b) an organic compound whose solubility in an aqueous alkaline developer is increased by exposure to acid and which contains at least one acid-cleavable grouping and, in addition, a further grouping which produces a strong acid when exposed to radiation, the polymeric binder (a) consisting of a mixture of a phenolic polymer and a resin of the novolak type. …??The mixture according to the invention is suitable, in particular, for producing photoresists.