Microwave power transfer coupler to plasma ply and linear microwave source for plasma surface treatment.

摘要

The invention relates to a coupler for transferring microwave power to a plasma layer comprising at least one UHF module formed by at least two secondary guides (15) powered at equal power from a main guide (13). ), and arranged side by side. BR/ The invention also relates to a linear microwave source for the treatment of surfaces, comprising: BR/ - a sealed enclosure (1); BR/ - means (B1, B2; A1, A2) for creating a magnetic field in the enclosure and generating a plasma layer (P); BR/ - coupling means between microwave transmission means and the enclosure (1); BR/ - at least one target (2); BR/ - pumping means (3); BR/ - gas injection means (9) for controlling the ionic species of the plasma layer (P). BR/ Application in particular to plasma surface treatment.