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Thin film transistor having enhance stability in electrical characteristics
Thin film transistor having enhance stability in electrical characteristics
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机译:具有增强电特性稳定性的薄膜晶体管
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摘要
A microwave plasma enhanced CVD method and apparatus wherein a microwave is applied, after expanded, over a greater area than the area in which a desired thin film is to be formed. With this arrangement, uniform microwave application is assured to produce uniform plasma over a wide area. This enables realization of a large size liquid crystal display.
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