PURPOSE: To prevent the occurrence of flakes which adhere to the internal surface of a reaction vessel by arranging a substrate between paired electrodes by giving a floating potential to the electrodes and respectively connecting the electrodes to both ends of a matching coil, and then, positioning the midpoint of the matching coil at a grounding level. ;CONSTITUTION: A reactive gas is discharged downward from the hole 8 of a supplying means 24 in the state of a uniform laminar flow. One 23 of paired electrodes 22 and 23 for plasma discharge is positioned below the hole 8 and connected to a matching transformer 25 for supplying electric energy and oscillator 21 and the other electrode 22 is positioned on the hood 7' of an exhausting means 24' so that the electrodes 22 and 23 can be arranged symmetrically. The midpoint of the transformer 25 is grounded in corresponding to the electrodes 22 and 23 and the electrodes 22 and 23 are made symmetrical with respect to a grounding level. Therefore, a substrate having a floating potential floating from the electrodes and frame structure in potential and holders 5 and 5' can hold films.;COPYRIGHT: (C)1995,JPO
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