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Executing method and the said method of connecting the conductor to the territory where the baseplate of the integrated circuit dopes with the laser the integrated circuit null which
Executing method and the said method of connecting the conductor to the territory where the baseplate of the integrated circuit dopes with the laser the integrated circuit null which
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机译:一种将导体连接到集成电路基板掺杂激光的区域的执行方法和所述方法,其中集成电路无效
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摘要
PURPOSE: To realize highly reliable connection by regulating the output, diameter, number of pulses and time of a laser beam being projected to a region and the end part of a conductor arranged thereon such that a defect for decreasing the electric resistance is generated at a part of a dielectric layer. CONSTITUTION: An end part 15a of a conductor 15 is arranged on a region 12 in order to form a connection 19 between them using a beam laser 20. The beam laser 20 having diameter D, output P and pulse time T is projected in the direction intersecting the upper surface 11a of a substrate 11 perpendicularly such that the impact zone 21 thereof is divided into a region 21a above the end part 15a and a region 21b above a dielectric layer 13. The output P, diameter D, number N and duration T of pulses of the beam laser 20 are regulated such that a defect for decreasing the electric resistance is generated at the connecting part 19 of the dielectric layer.
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