CERAMIC-COATED FILM, PRODUCTION OF CERAMIC-COATED FILM AND DEVICE THEREFOR

摘要

PURPOSE: To produce a ceramic-coated film excellent in adhesion to a base film and capable of being previously destaticized without affecting the formation of a ceramic thin film by using this device. ;CONSTITUTION: An adsorbed molecule layer consisting of a polar molecule is formed on the surface of a base film 2 consisting of a high molecular material, and then a ceramic thin film of metal or metallic compd. is formed on the adsorved molecule layer. Consequently, the discharge is prevented by the formed adsorbed molecule layer, the ceramic having reacted with the adsorbed molecule is diffused by the collision of a gaseous metal or metallic compd. when the film is formed, and the adhesion of the of the ceramic thin film layer is improved.;COPYRIGHT: (C)1995,JPO