机译:制备用于高频声表面波器件的自支撑金刚石膜
School of Materials Science and Engineering, Shanghai University, Shanghai 200072, China;
School of Materials Science and Engineering, Shanghai University, Shanghai 200072, China;
School of Materials Science and Engineering, Shanghai University, Shanghai 200072, China;
School of Materials Science and Engineering, Shanghai University, Shanghai 200072, China;
School of Materials Science and Engineering, Shanghai University, Shanghai 200072, China;
School of Materials Science and Engineering, Shanghai University, Shanghai 200072, China;
Department of Physics, Mudanjiang Normal College, Mudanjiang 157012, China;
School of Materials Science and Engineering, Shanghai University, Shanghai 200072, China;
free-standing diamond film; surface roughness; ZnO thin film; surface acoustic wave devices;