HIGH-RESOLUTION, HIGH-ACCURACY MEASURING INSTRUMENT USING SCANNING TUNNELING MICROSCOPE

摘要

PURPOSE: To perform high-resolution, high-accuracy measurement by utilizing high atomic-level resolution by using a scanning tunneling microscope (STM) equipped with a sample stage which is independent of an STM unit and a sample to be observed set on the stage. ;CONSTITUTION: A reference sample 14 is mounted on the scanner of an observation-side STM unit 10 and the displacement of the scanner in the X-and Y-directions is separately detected by means of a reference-side STM unit 20 set one step above the unit 20. The surface length of a sample 31 to be observed is measured by fetching the output signal of the unit 20 indicating the electronic image of the sample 14 and the output signal of the unit 10 indicating the STM image of the sample 31 to a measuring and controlling device 40 and performing arithmetic processing on the output signal indicating the STM image of the sample 31 by means of a CPU 43 by using the output signal indicating the electronic image of the sample 14 as a reference length. Driving power is supplied to each section of the units 10 and 20 from a drive control section 46. Especially, a servo circuit is connected to a Z-direction fine adjustment piezoelectric element 16 and the stage 30 of the sample 31 is driven by means of a three-dimensional scanner.;COPYRIGHT: (C)1994,JPO