首页> 外国专利> Process for preparing a reinforcement, in order to reduce the particles in a chamber physical vapor deposition.

Process for preparing a reinforcement, in order to reduce the particles in a chamber physical vapor deposition.

机译:为了减少腔室内的物理气相沉积而制备增强物的方法。

摘要

AT A method for preparing a shield (17) for use in a physical Vapor Deposition Process, SHIELD is cleaned by a process of erosion ACID TO ENHANCE THE ACCESSION OF DEPOSITS IN THE PHYSICAL VAPOR PROCESS deposition. EROSION cleaning by acid serves to loosen contamination which could form a diffusion barrier and prevent DEPOSITS join the ARMOR. ALSO BY EROSION CLEANING ACID CREATES A HIGH DEGREE OF microroughness. Ruggedness allows for increased nucleation sites minimizing FORMATION OF INTERMEDIATE BLANKS. Besides being cleaned by acid erosion process, shielding may be exposed to the action of a stream of particles. EXPOSURE TO STREAM PARTICLE SURFACE MAKES ARMOR IRREGULAR. This improves the separation of contact surface material deposited on a microscopic scale, RESULTING IN A MINOR comminution.
机译:在一种制备用于物理气相沉积过程中的屏蔽物(17)的方法中,通过腐蚀酸的过程清洁SHIELD,以增强物理气相过程沉积中的沉积物的形成。用酸进行腐蚀清洗可以消除污染物,污染物可以形成扩散屏障,并防止沉积物进入装甲车。此外,通过腐蚀酸也可产生很高的微粗糙度。坚固性可增加成核位点,从而最大程度地减少中间毛坯的形成。除了通过酸蚀工艺进行清洁外,屏蔽层还可能暴露于颗粒流的作用下。暴露于颗粒表面会导致装甲不规则。这改善了在微观尺度上沉积的接触表面材料的分离,从而导致微小的粉碎。

著录项

  • 公开/公告号ES2076385T3

    专利类型

  • 公开/公告日1995-11-01

    原文格式PDF

  • 申请/专利权人 APPLIED MATERIALS INC.;

    申请/专利号ES19910102324T

  • 申请日1991-02-19

  • 分类号C23C14/22;C23C14/02;C23C14/34;C23C14/56;

  • 国家 ES

  • 入库时间 2022-08-22 04:16:33

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