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Process for preparing a reinforcement, in order to reduce the particles in a chamber physical vapor deposition.
Process for preparing a reinforcement, in order to reduce the particles in a chamber physical vapor deposition.
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机译:为了减少腔室内的物理气相沉积而制备增强物的方法。
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摘要
AT A method for preparing a shield (17) for use in a physical Vapor Deposition Process, SHIELD is cleaned by a process of erosion ACID TO ENHANCE THE ACCESSION OF DEPOSITS IN THE PHYSICAL VAPOR PROCESS deposition. EROSION cleaning by acid serves to loosen contamination which could form a diffusion barrier and prevent DEPOSITS join the ARMOR. ALSO BY EROSION CLEANING ACID CREATES A HIGH DEGREE OF microroughness. Ruggedness allows for increased nucleation sites minimizing FORMATION OF INTERMEDIATE BLANKS. Besides being cleaned by acid erosion process, shielding may be exposed to the action of a stream of particles. EXPOSURE TO STREAM PARTICLE SURFACE MAKES ARMOR IRREGULAR. This improves the separation of contact surface material deposited on a microscopic scale, RESULTING IN A MINOR comminution.
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